Systematic errors for a Mueller matrix dual rotating compensator ellipsometer

Multichannel Mueller matrix ellipsometer based on the dual rotating compensator principle

A multichannel ellipsometer in the dual rotating-compensator configuration has been designed and constructed for applications in real time Mueller matrix ellipsometry (approx. 2–5 eV) of anisotropic surfaces and films. The sequence of optical elements for this instrument is denoted PC (v )SC (v )A, where P, S, and A represent the polarizer, sample, and analyzer. C (v ) and 1r 1 2r 2 1r 1 C (v )...

Systematic errors specific to a snapshot Mueller matrix polarimeter.

Systematic errors specific to a snapshot Mueller matrix polarimeter are studied. Their origins and effects are highlighted, and solutions for correction and stabilization are proposed. The different effects induced by them are evidenced by experimental results acquired with a given setup and theoretical simulations carried out for more general cases. We distinguish the errors linked to some imp...

Rotating or Rotatable Compensator Spectroscopic Ellipsometer System Including Multiple Element Lenses

Combined Spatial Filter and Relay Systems in Rotating Compensator Ellipsometer/Polimeter

Liphardt et al. (*) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 U.S.C. 154(b) by 0 days. This patent is subject to a terminal dis-claimer. ABSTRACT Low aberration relay systems modified to perform as spatial filters in rotating compensator ellipsometer, polarimeter and the like systems.

Rotating analyzer–fixed analyzer ellipsometer based on null type ellipsometer

The theory and design of an inexpensive rotating analyzer unit is presented, which allows a conventional null type ellipsometer to work as rotating analyzer–fixed analyzer automatic ellipsometer, without sacrificing the possibility to work in null mode. The mode switching is performed simply by adding or removing the rotating analyzer from its holder. It is shown that the rotating analyzer phas...